DP-C20F High Purity Pump

High Purity Pump DP-C20F

Yamada pumps are the standard for reliability in critical semiconductor applications.

Yamada Corporation has been a leading producer of industrial equipment since 1905, and of fluid handling products for over 65 years. As a leader in pneumatic pumping technology, Yamada is known in many industries worldwide for its innovative products, superior quality, and unmatched reliability. An impressive history of product design and engineered solutions establishes Yamada as the front runner in industrial pump technology.

Yamada offers several pump options for chemical transfer with accessories such as dampeners, controllers, fiber optic stroke sensors, and leak detection equipment. Not only is Yamada Corporation the worldwide leader in high purity semiconductor pumps, Yamada also provides the most complete line of chemical waste treatment and acid neutralization pumps in the market. We round out our offering of pumps with a line of high quality stainless steel pumps used in solvent delivery applications.

While some of our traditional F-Series have been in service since the mid 1980’s, Yamada engineers have been at the forefront in developing new product designs to address the continuously changing requirements in the industry. Yamada’s latest high purity advancement features completely nonmetallic internals, longer diaphragm and check valve life plus up to two year maintenance-free operation. Each DP-C F-Series pump is assembled, tested, and packaged in a Class 10 clean room and comes with a standard one year or two year warranty and several of our models are available with a maintenance-free two year performance guarantee, regardless of cycle life.


  • Fiber optic sensor to control stroke length
  • External shuttle operation
  • Reduction in weight over previous generations
  • Clean Room Manufactured & Tested 
  • Field Serviceable 
  • Yamada Profile


  •  Longer diaphragm life
  •  Consistent performance & constant volume per cycle, flexible programming to fit application requirements
  •  Easy to remove & replace inside cabinet
  •  Assured reliability & prevents contamination
  •  Maintenance friendly, easily repaired in house
  •  Excellent reputation in the high purity bulk chemical market with over 41,000 units 



180 mL / .048 mL Discharge Volume / Cycle

Fluid Connection Suction Port and Discharge Port Tube Size O.D. 19mm (3/4”)

Air Connection Supply Port and  Exhaust Port 1/4” NPT

Operating Air Pressure 0.2-0.5 MPa / 30 - 70 psi

Maximum Discharge Pressure 0.5 MPa / 70 psi

Allowable Maximum Intake Pressure 0.06 MPa / 8 psi

Discharge Volume / Cycle 180 mL / .048 mL

Maximum Discharge Volume 40 L/min / 10 gpm

Maximum Air Consumption 450 L/min(ANR) / 16 SCFM

Operating Temperature Range (Ambient) 0-70oC / 32-158oF

Operating Temperature Range (Ambient) Fluid Temperature 0-80oC / 32-176oF

Weight 12.2 kg / 27 lbs.

Shipping Weight 14.5 kg / 32 lbs.

Available Connections: Flaretek®, Pillar, SMC & Custom (contact factory)

Options:  External shuttle only, stroke detection, fiber optic

Carbon filled Flaretek® fittings



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